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CCD Image Sensors in Deep-Ultraviolet - Li, FloraNathan, Arokia
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Li, FloraNathan, Arokia:

CCD Image Sensors in Deep-Ultraviolet - encadernado, livro de bolso

2005, ISBN: 9783540226802

[ED: Hardcover], [PU: Springer / Springer Berlin Heidelberg / Springer, Berlin], As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and… mais…

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CCD Image Sensors in Deep-Ultraviolet - Flora Li
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CCD Image Sensors in Deep-Ultraviolet - novo libro

2001, ISBN: 9783540226802

[ED: Buch], [PU: Springer-Verlag GmbH], Neuware - As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are… mais…

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CCD Image Sensors in Deep-Ultraviolet - Flora Li
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Flora Li:
CCD Image Sensors in Deep-Ultraviolet - novo libro

2001

ISBN: 9783540226802

[ED: Buch], [PU: Springer-Verlag GmbH], Neuware - As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are… mais…

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CCD Image Sensors in Deep-Ultraviolet - Flora Li
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Flora Li:
CCD Image Sensors in Deep-Ultraviolet - novo libro

2001, ISBN: 9783540226802

[ED: Buch], [PU: Springer-Verlag GmbH], Neuware - As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are… mais…

Custos de envio:Versandkostenfrei, Versand nach Deutschland. (EUR 0.00) Buchhandlung - Bides GbR
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CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms - Li, Flora; Nathan, Arokia
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Li, Flora; Nathan, Arokia:
CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms - encadernado, livro de bolso

2005, ISBN: 354022680X

2005 Gebundene Ausgabe Mikrotechnologie - Mikrotechnik, Technologie / Mikrotechnologie, Sensor - Sensorik, Ingenieurwissenschaft - Ingenieurwissenschaftler, Maschinenbau, Materialwissen… mais…

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CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS)

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths. TOC:Introduction.- Overview of CCD.- CCD Imaging in the Ultraviolet Regime.- Silicon.- Silicon Dioxide.- Si-SiO2 Interface.- General Effects of Radiation.- Effects of Radiation on CCDs.- UV-Induced Effects in Silicon.- UV-Laser-Induced Effects in SiO2.- UV-Laser-Induced Effects in the Si-SiO2 Interface.- CCD Measurements at 157 nm.- Design Optimizations for Future Research.- Concluding Remarks.- Glossary.

Dados detalhados do livro - CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS)


EAN (ISBN-13): 9783540226802
ISBN (ISBN-10): 354022680X
Livro de capa dura
Livro de bolso
Ano de publicação: 2002
Editor/Editora: Springer-Verlag GmbH

Livro na base de dados desde 2007-05-22T10:58:04+01:00 (Lisbon)
Página de detalhes modificada pela última vez em 2022-08-05T17:33:25+01:00 (Lisbon)
Número ISBN/EAN: 354022680X

Número ISBN - Ortografia alternativa:
3-540-22680-X, 978-3-540-22680-2
Ortografia alternativa e termos de pesquisa relacionados:
Autor do livro: flora
Título do livro: mems, sensor, flora heidelberg, ccd, into the deep, deep value, damage, degradation, ultraviolet


Dados da editora

Autor: Flora Li; Arokia Nathan
Título: Microtechnology and MEMS; CCD Image Sensors in Deep-Ultraviolet - Degradation Behavior and Damage Mechanisms
Editora: Springer; Springer Berlin
232 Páginas
Ano de publicação: 2005-03-01
Berlin; Heidelberg; DE
Língua: Inglês
160,49 € (DE)
164,99 € (AT)
177,00 CHF (CH)
Available
XII, 232 p. 84 illus.

BB; Hardcover, Softcover / Technik/Maschinenbau, Fertigungstechnik; Technische Anwendung von elektronischen, magnetischen, optischen Materialien; Verstehen; Ingenieurwissenschaften; Physik; CCD image sensor; Deep-UV damage mechanisms; Eximer laser; Photodiode; Sensor; UV photodiodes; design; imaging; integrated circuit; laser; optimization; semiconductor; technology; Optical Materials; Laser; Technology and Engineering; Electronics and Microelectronics, Instrumentation; Laserphysik; Ingenieurswesen, Maschinenbau allgemein; Elektronik; EA; BC

Overview of CCD.- CCD Imaging in the Ultraviolet (UV) Regime.- Silicon.- Silicon Dioxide.- Si-SiO2 Interface.- General Effects of Radiation.- Effects of Radiation on CCDs.- UV-Induced Effects in Si.- UV Laser Induced Effects in SiO2.- UV Laser Induced Effects at the Si-SiO2 Interface.- CCD Measurements at 157nm.- Design Optimizations for Future Research.- Concluding Remarks.
The first book to integrate CCD image sensor characteristics, their intrinsic instabilities, and the effect of UV radiation on device characteristics

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